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VHS-6Diffusion PumpInstruction ManualVarian Vacuum Technologies121 Hartwell AvenueLexington, MA 02421-3133(781) 861-7200(800) 8-VARIANManual No. 6999-

viii. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tissuesor eyes, it can cause severe frostbite or

viiiWARNING_____________High voltages can kill. Always break the primary circuit to the powersupply before starting to work on the heater and/or its w

ixNOTE________Always dispose of used or dirty oil properly and in compliance with alllocal, state, and federal environmental laws and regulations.CAUT

xTable of ContentsSection PageSection I – Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1-1SECTION IINSTALLATIONBefore unpacking and installing the VHS-6 Diffusion Pump, the user should thoroughly familiarizehimself with this instruction

Installation1-2Heater circuit resistance (ohms) 2200 watts120V 6.5208V 19.6240V 26.1Clearance (for heater removal) 6 inches minimumMaterialsBody, flan

WARNINGDiffusion pump heaters operate at voltages high enough to kill throughelectrical shock. During installation, check the drawings and be sure toa

Installation1-41-2-5 Electrical Connectionsa The diffusion pump has been designed to operate at a specific voltage. The voltage isspecified on the lab

2-1switch. This should be done only after the root cause of a problem has been determined andthe appropriate corrective action taken.SECTION IICAUTION

Operation2-22-2 SHUTDOWN PROCEDUREaTurn off the power to the diffusion pump. Continue to back the diffusion pump with the appro-priate mechanical pump

AmericaVarian Vacuum Technologies121 Hartwell AvenueLexington, MA 02421, USATel: (781) 861 7200Fax: (781) 860 5437Toll Free: 1 (800) 882 7426Argenti

3-1c After isolating the backing pump, the diffusion pump may be vented to atmosphere.d If faster cooling is desired, the pump can be cooled using the

Maintenance and Servicec Unbolt the inlet flange and foreline connections. Remove the pump from the system.dDrain the diffusion pump of all fluid.e Re

Maintenance and Service3-3Figure 3-1 Cold Cap Removal/Installatione Install the spring (1) attached by the screw, (2) and washers (3 and 4). Torque th

Maintenance and Service3-4b Insert the jet base, making sure the ejector is aligned with the foreline (a keyway in the jetbase will assure alignment).

4-1SECTION IVTROUBLESHOOTING4-1 LEAKAGEAnalysis of general operational experience with diffusion pumps indicates that certain locations aremore prone

Troubleshooting4-2Table 4-1 TroubleshootingFault Probable Cause Corrective ActionPoor system pressure Leaks in system, virtual or real Locate and repa

5-1SECTION VREPLACEMENT PARTSThe following parts are available from Varian; please call the 800 number listed inside the front coverof this manual.Tab

Replacement Parts5-2

Replacement Parts5-3

Replacement Parts5-4VHS-6ASA ISO ConFlatin mm in mm in mmA Height21.92 557 21.92 557 21.92 557B Centerline to Centerline13.38 340 13.38 340 13.38 340C

WARRANTYProducts manufactured by Seller are warranted against defects in materials and workmanship fortwelve (12) months from date of shipment thereof

Replacement Parts5-5Note: Speed curves were generated according to AVS Standard 4.11 Torr - 133 PaVHS-6 Speed and Throughput Curves

iOPERATION AND MAINTENANCE OF THIS EQUIPMENT INVOLVES SERIOUS RISK. IT IS THERESPONSIBILITY OF THE USER TO MAINTAIN SAFE OPERATING CONDITIONS AT ALL T

iiSAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THERESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGHREDUND

iiiTHE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONEOR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF

ivHazard Suggested Corrective ActionExplosion Integrate pressure relief valves in all systems using pumps 10 inches or larger in diameter.Do not use o

vProhibited Action Explosion-Causing ConditionOpen drain or fill plug while pump is Overpressure plus strong oxidizerunder vacuum, especially when it

vid. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corrosivegas, vapors, or chemicals, even proper operation and reg